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M Silova
Academic Work (1)
Conference paper (1)
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InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching
Conference paper (2000) -
JJGM van der Tol (author)
,
M Silova (author)
,
F Karouta (author)
,
RG Broeke (author)
,
HH Tan (author)
,
C Jagadish (author)
,
E Smalbrugge (author)
,
BH van Roy (author)
