InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching

van der Tol, JJGM; Silova, M; Karouta, F; Broeke, RG; Tan, HH; Jagadish, C; Smalbrugge, E; van Roy, BH

InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching

Conference paper (2000)

Authors

JJGM van der Tol External organisation

M Silova External organisation

F Karouta External organisation

RG Broeke Old - EWI Ch. Photonic Integrated Circuits

HH Tan External organisation

C Jagadish External organisation

E Smalbrugge External organisation

BH van Roy External organisation

Research Group

Old - EWI Ch. Photonic Integrated Circuits

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Published Date

2000

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Research Group

Old - EWI Ch. Photonic Integrated Circuits

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