Exhaust gas measurement in the harsh environment of the tailpipe of a combustion engine by optical techniques is a highly robust technique, provided that optical access is maintained in the presence of particulate matter (PM). The considerations are presented for the systematic design of membranes with integrated heaters in SiC-on-Si technology for generating a well-defined lateral temperature profile with peak temperatures above 600 °C. Periodically raising the temperature of the membranes to such a level is demonstrated to keep the surface transparent by oxidation of soot deposits. This paper is about continuous heating of the membrane to a temperature slightly higher than that of the exhaust gas. At such temperatures thermophoretic repulsion of PM allows allows long-term optical measurement in the exhaust without the thermo-mechanical loading by repetitive thermal cycling.@en