A. Williams | TU Delft Repository

AW

A. Williams

Conference paper (2)

2 records found

1

Observations on the Optical Point Spread Function of a Lithographic Projection Lens

Conference paper (2002) - P. Dirksen (author), J.J.M. Braat (author), JJM Braat (author), P. de Bisschop (author), A Janssen (author), C. Juffermans (author), A. Williams (author)

Resolving relevance, quality and quality assurance: a transitional criteria approach

Conference paper (2002) - R Cowdroy (author), A. Williams (author), E. Van Der Graaff (author), E Van Der Graaff (author), E van der Graaff (author), E. van der Graaff (author), Y Mauffette (author)