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Conference paper (1)

1 records found

1

Ultra thin gate oxides for 0.1 mm hetrojunction CMOS applications by the use of a sacrifical Si layer

Conference paper (1998) - R Loo (author) , M Caymax (author) , P Verheyen (author) , T Conard (author) , H Bender (author) , W Vandervorst (author) , N Collaert (author) , KD Meyer (author) , P.F.A. Alkemade (author) , I Szendrö (author)