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HF
H-J Funke
Academic Work (1)
Journal article (1)
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Fast etching of molding compound by an Ar/O2/CF4 plasma and process improvements for semiconductor package decapsulation
Journal article (2012) -
J. Tang (author)
,
D Gruber (author)
,
JBJ Schelen (author)
,
H-J Funke (author)
,
C.I.M. Beenakker (author)
