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M Cafe

Conference paper (2)

2 records found

1

Linear nano-positioning stage using ferrofluid bearings

Conference paper (2014) - R. Deng (author), S van Veen (author), M Cafe (author), J.W. Spronck (author), Jo Spronck (author), R.H. Munnig Schmidt (author), RH Munnig Schmidt (author), Robert Munnig Schmidt (author)

Nanometer precision six degrees of freedom planar motion stage with ferrofluid bearings

Conference paper (2014) - M Cafe (author), J.W. Spronck (author), Jo Spronck (author)