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Academic Work (2)
Conference paper (2)
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2 records found
1
Linear nano-positioning stage using ferrofluid bearings
Conference paper (2014) -
R. Deng (author)
,
S van Veen (author)
,
M Cafe (author)
,
J.W. Spronck (author)
,
Robert Munnig Schmidt (author)
Nanometer precision six degrees of freedom planar motion stage with ferrofluid bearings
Conference paper (2014) -
M Cafe (author)
,
JW Spronck (author)
