Linear nano-positioning stage using ferrofluid bearings

Conference paper (2014)

Authors

R. Deng Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

S van Veen External organisation

M Cafe External organisation

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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More Info

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Published Date

2014

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design