RC

R. Chen

1 records found

Review Article

Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"

Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas-solid reactions, has become the method of choice in semiconductor manufacturing and many other technological areas for depositing thin conformal inorganic material la ...