KY

Kai Wa Yan

3 records found

Authored

The increasing demands on throughput and accuracy of semiconductor manufacturing equipment necessitates accurate feedforward motion control that includes compensation of input nonlinearities. The aim of this paper is to develop a data-driven feedforward approach consisting of ...

Advanced feedforward control methods enable mechatronic systems to perform varying motion tasks with extreme accuracy and throughput. The aim of this paper is to develop a data-driven feedforward controller that addresses input nonlinearities, which are common in typical appli ...

Contributed

The speed and precision required in the precision motion industry is an ever-growing challenge. Linear control offers intuitive frequency-domain controller design methods that are based on a frequency response function (FRF) of the plant, which is obtained solely from measurement ...