S Milosavljevi¿ | TU Delft Repository

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S Milosavljevi¿

Conference paper (2)

2 records found

1

Sub-100 nm silicon-nitride hard-mask for high aspect-ratio silicon fins

Conference paper (2007) - V Jovanovi¿ (author) , S Milosavljevi¿ (author) , L. K. Nanver (author) , T Suligoj (author) , P Biljanovi¿ (author)

Integration of a ¿hands-on¿ research training course in a high-discipline IC-processing research cleanroom

Conference paper (2007) - S Milosavljevi¿ (author) , H. Schellevis (author) , A. van den Bogaard (author) , T.L.M. Scholtes (author) , J.M.W. Laros (author) , Charles de Boer (author) , E.J.G. Goudena (author) , LK Nanver (author)