S Milosavljevi¿ | TU Delft Repository

SM

S Milosavljevi¿

Conference paper (2)

2 records found

1

Sub-100 nm silicon-nitride hard-mask for high aspect-ratio silicon fins

Conference paper (2007) - V Jovanovi¿ (author), S Milosavljevi¿ (author), L.K. Nanver (author), LK Nanver (author), T Suligoj (author), P Biljanovi¿ (author)

Integration of a ¿hands-on¿ research training course in a high-discipline IC-processing research cleanroom

Conference paper (2007) - S Milosavljevi¿ (author), H Schellevis (author), H. Schellevis (author), A. van den Bogaard (author), T.L.M. Scholtes (author), J.M.W. Laros (author), CR de Boer (author), C.R. de Boer (author), E.J.G. Goudena (author), LK Nanver (author), L.K. Nanver (author)