We present modulated surface textures on glass substrates for improved light trapping in thin-film silicon solar cells. The surface morphology, the roughness spectral distribution, and the scattering properties of the modulated surface-textured substrates were characterized. We deposited solar cells on the modulated surface-textured substrates and observed enhancement in the performance compared to a solar cell deposited on textured ZnO:Al (reference) substrates.@en