M

MF Bal

8 records found

Authored

Optimization of mulitlayer reflectors for extreme ultraviolet lithography
Journal article (2004) - MF Bal, M Singh, J.J.M. Braat

Analysis search and classification for reflective ring-field projection systems
Journal article (2003) - MF Bal, F. Bociort, J.J.M. Braat

Wavefront correction methods for extreme-ultraviolet multilayer reflectors
Journal article (2003) - M Singh, MF Bal, J.J.M. Braat, D Joyeux, U Dinger

Next-Generation Extreme Ultraviolet Lithographic Projection Systems
Doctoral thesis (2003) - MF Bal

Influence of Multilayers on the optical Performance of Extreme Ultra Violet Projection Systems.
Conference paper (2002) - MF Bal, F. Bociort, J.J.M. Braat

Optimizing multilayer coatings for extreme UV projection systems
Conference paper (2002) - MF Bal, M Singh, J.J.M. Braat

The effect of obstructions on the design of reflective ring-field projection systems.
Conference paper (2001) - MF Bal, F. Bociort, J.J.M. Braat

Systematic analysis of unobscured mirror systems for microlithography.
Conference paper (2000) - F. Bociort, MF Bal, J.J.M. Braat