Piezoelectric tube scanners are commonly used in Scanning Probe Microscopy (SPM) to provide the scanning motion of the tip or sample. Oscillations due to the weakly damped resonances of the scanner are a major souce of image distortion in SPM-imaging. In this contribution, multiple input-multiple output (MIMO) self-sensing actuation of a piezoelectric tube scanner is presented, allowing to actively dampen the scanner oscillation. By connecting the tube scanner in a capacitive bridge-circuit, the piezoelectric tube is simultaneously used as a sensor and actuator. In order to enable the use of low-order decentralized controllers, the cross-talk between both axes is reduced by compensating for the capacitive coupling. The MIMO self-sensing actuation allows to actively dampen the scanners's fundamentsl resonance by 18dB, which simultaneously reducing the resonance induced coupling by 30dB. Experimental results verify a significant reduction of the scanner oscillations in both positioning axes during fast scanning.@en

Piezoelectric tube scanners are typically used in atomic force microscopy (AFM) to prove the scanning motion of the sample. Excitation of the weakly damped fundamental resonance of the tube scanner leads to oscillations that can cause severe image distortion. This paper presents self-sensing actuation of a piezoelectric tube scanner in order to actively damp the fundamental resonance. By electrically connection the tube scanner in a capacitive bridge-circuit, the scanner oscillations can be measured without the need for expensive position sensors. In order to compensate for circuit imbalance caused by hysteresis an adaptation circuit is use. The obtained measurement signal is used for feedback control, adding 18dB of damping to the scanners fundamental resonant mode. AFM images are obtained showing a significant reduction in image distortion compared to the uncontrolled case.@en