Dual actuated nano-positioning for high speed atomic force microscopy

Conference paper (2010)

Authors

S. Kuiper DISC - Mechanical, Maritime and Materials Engineering
G Schitter Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
DISC (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Delft Center for Systems and Control

Research Group

DISC