M.P. Van | TU Delft Repository

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M.P. Van

Journal article (1)

1 records found

1

Enhanced lithographic resolution using longitudinal polarization state of light

Journal article (2015) - M.P. Van (author), K. Ushakova (author), CWM Bastiaansen (author), S.F. Pereira (author), Paul Urbach (author), DJ Broer (author)