Patterned growth of carbon nanotubes for vertical interconnects in 3D integrated circuits

Conference paper (2010)

Authors

S. Vollebregt Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

W.H.A. Wien Electronic Components, Technology and Materials -

J. van der Cingel Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:febe6eb6-54ec-4ae0-a1e1-5e8d7cb211dc

More Info

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Published Date

2010

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials