Optimization of silicon-rich silicon nitride films for electron multiplication in timed photon counters

Prodanovic, V.; Chan, Hong Wah; Smedley, John; Theulings, A; Tao, S; van der Graaf, H; Sarro, Pasqualina M

Optimization of silicon-rich silicon nitride films for electron multiplication in timed photon counters

Conference paper (2015)

Authors

V. Prodanovic Electronic Components, Technology and Materials -

Hong Wah Chan Electronic Components, Technology and Materials -

John Smedley External organisation

A Theulings External organisation

S Tao External organisation

H van der Graaf External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:fe312187-7de9-4069-8305-b30bc3f66e7c

More Info

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Published Date

2015

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials