Silicon-on-Glass & Silicon-on-Insulator MEMS Acceleration (Inertial) Sensors - Design & Process Development

Report (2008)

Authors

V. Rajaraman Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2008

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation