Extremely ultrashallow junctions for a high-linearity silicon-on-glass RF varactor-diode technology

Conference paper (2008)

Authors

L.K. Nanver Electronic Components, Technology and Materials - EEMCS
F Sarubbi Electronic Components, Technology and Materials - EEMCS
V Gonda Old - EWI Sect. ECTM
M Popadic Electronic Components, Technology and Materials - EEMCS
T.L.M. Scholtes Electronic Components, Technology and Materials - EEMCS
W.B. de Boer Electronic Components, Technology and Materials - EEMCS
K. Buisman Electronics - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2008

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials