Extremely ultrashallow junctions for a high-linearity silicon-on-glass RF varactor-diode technology

Nanver, L. K.; Sarubbi, F; Gonda, V; Popadic, M; Scholtes, T.L.M.; de Boer, W.B.; Buisman, K.

Extremely ultrashallow junctions for a high-linearity silicon-on-glass RF varactor-diode technology

Conference paper (2008)

Authors

L. K. Nanver Electronic Components, Technology and Materials

F Sarubbi Electronic Components, Technology and Materials

V Gonda Old - EWI Sect. ECTM

M Popadic Electronic Components, Technology and Materials

T.L.M. Scholtes Electronic Components, Technology and Materials

W.B. de Boer Electronic Components, Technology and Materials

K. Buisman Electronics

Research Group

Electronic Components, Technology and Materials

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Published Date

2008

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Research Group

Electronic Components, Technology and Materials

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