Design of in-package MST-based actuators for micro-assembly

Henneken, VA; van den Bedem, S; Tichem, M.; Karpuschewski, B; Sarro, Pasqualina M

Design of in-package MST-based actuators for micro-assembly

Conference paper (2004)

Authors

VA Henneken Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

S van den Bedem External organisation

M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

B Karpuschewski Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)

Elektrotechniek Techniek

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Published Date

2004

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering