A novel dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

Su, J; van Zeijl, H.W.; Paalvast, SL; Sarro, Pasqualina M; van Eijk, J.

A novel dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

Conference paper (2006)

Authors

J Su External organisation

H.W. van Zeijl Electronic Components, Technology and Materials -

SL Paalvast Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Pasqualina M Sarro Electronic Components, Technology and Materials -

J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2006

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials