Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode

Tran, A.T.; Moh, T.S.Y.; Pandraud, Gregory; Schellevis, H.; Akhnoukh, Atef; Sarro, P. M.

Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode

Conference paper (2013)

Authors

A.T. Tran Electronic Components, Technology and Materials

T.S.Y. Moh Electronic Components, Technology and Materials

Gregory Pandraud Electronic Components, Technology and Materials

H. Schellevis Electronic Components, Technology and Materials

Atef Akhnoukh Electronics

P. M. Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2013

Language

English

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Research Group

Electronic Components, Technology and Materials

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