In-package MEMS-based thermal actuators for micro-assembly

Conference paper (2005)

Authors

VA Henneken Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2005

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering