Fabrication of a SOG-MEMS vibratory gyroscope by deep RIE technology and bonding (U_SP_2_I_IC_T)

Rajaraman, V.; Craciun, G; Yang, H; Pakula, L.S.; van der Drift, E.W.J.M.; Makinwa, K.A.A.; French, P.J.

Fabrication of a SOG-MEMS vibratory gyroscope by deep RIE technology and bonding (U_SP_2_I_IC_T)

Book chapter (2007)

Authors

V. Rajaraman Electronic Instrumentation -

G Craciun Electronic Instrumentation -

H Yang Electronic Instrumentation -

L.S. Pakula Electronic Instrumentation -

E.W.J.M. van der Drift QN/Kavli Nanolab Delft -

K.A.A. Makinwa Electronic Instrumentation -

P.J. French Electronic Instrumentation -

Research Group

Electronic Instrumentation () (TU Delft)

Other public output

To reference this document use:

http://resolver.tudelft.nl/uuid:f0ac1eb1-9b00-47a4-9977-bad5cf660e27

More Info

expand_more

Published Date

2007

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation