Effect of silicon nanowire etching on signal-to-noise ratio of SiNW FETs for (bio)sensor applications

Moh, T.S.Y.; Nie, M.; Pandraud, G.; de Smet, L.C.P.M.; Sudhölter,  Ernst J. R.; Huang, Q-A; Sarro, Pasqualina M

Effect of silicon nanowire etching on signal-to-noise ratio of SiNW FETs for (bio)sensor applications

Journal article (2013)

Authors

T.S.Y. Moh OLD ChemE/Organic Materials and Interfaces , Electronic Components, Technology and Materials -

M. Nie Electronic Components, Technology and Materials -

G. Pandraud Electronic Components, Technology and Materials -

L.C.P.M. de Smet OLD ChemE/Organic Materials and Interfaces

Ernst J. R. Sudhölter OLD ChemE/Organic Materials and Interfaces

Q-A Huang External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2013

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials