Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments

Conference paper (2009)

Authors

K Babaei Gavan QN/Mol. Electronics & Devices
J van der Heijden External organisation
E.W.J.M. van der Drift QN/Kavli Nanolab Delft
Herre Zant QN/Mol. Electronics & Devices
Research Group
QN/Mol. Electronics & Devices
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Published Date

2009

Language

English

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Research Group

QN/Mol. Electronics & Devices

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