Electrical characterization of TiSi / TiN layer stack in temperature range from 0-500 C

Mihailovic, M; Creemer, J.F.; Sarro, PM

Electrical characterization of TiSi / TiN layer stack in temperature range from 0-500 C

Conference paper (2010)

Authors

M Mihailovic Electronic Components, Technology and Materials

J.F. Creemer Electronic Components, Technology and Materials

PM Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2010

Language

English

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Research Group

Electronic Components, Technology and Materials

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