Harmonic displacement of a parallel-plate electrostatic actuator using a pre-distorted sine wave oscillator

Conference paper (2004)

Authors

G. Graaf Electronic Instrumentation
L Mol External organisation
LA Rocha Electronic Instrumentation
E Cretu External organisation
Reinoud Wolfenbuttel Electronic Instrumentation
Research Group
Electronic Instrumentation
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Published Date

2004

Language

Undefined/Unknown

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Research Group

Electronic Instrumentation