Low-stress PECVD SiC thin films for IC-compatible microstructures [niet eerder opgevoerd]

Sarro, Pasqualina M; de Boer, C.R.; Korkmaz, E; Laros, J.M.W.

Low-stress PECVD SiC thin films for IC-compatible microstructures [niet eerder opgevoerd]

Journal article (1998)

Authors

Pasqualina M Sarro Electronic Components, Technology and Materials -

C.R. de Boer Electronic Components, Technology and Materials -

E Korkmaz Electromagnetism

J.M.W. Laros Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

1998

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials