An analytical model and verification for MEMS Pirani gauges

Santagata, F.; Iervolino, E.; Mele, L.; van Herwaarden, AW; Creemer, J.F.; Sarro, Pasqualina M

An analytical model and verification for MEMS Pirani gauges

Journal article (2011)

Authors

F. Santagata Electronic Components, Technology and Materials -

E. Iervolino Old - EWI Sect. ECTM

L. Mele Electronic Components, Technology and Materials -

AW van Herwaarden External organisation

J.F. Creemer Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:e539e9ad-aec8-495c-82bd-3174c4e5beda

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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials