Fabrication and optical measurements of multi-slit grating based infrared micro-spectrometer

Conference paper (2001)

Authors

SH Kong Electronic Instrumentation - EEMCS
DDL Wijngaards Electronic Instrumentation - EEMCS
G. de Graaf Electronic Instrumentation - EEMCS
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2001

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation