Self-sensing contact detection in piezo-stepper actuator

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Abstract

Piezo steppers or piezo-walk actuators are attractive primararily because of their high accuracy and long range of motion combined in a single actuator. They are commonly used devices for short stroke scanners where significant range of motion is desired with good displacement resolution. A major performance limiting factor in these actuators is that, during stepping, large disturbances and vibrations are induced due to hammering action of the clamp piezolegs leading to development of stepping errors. In order to reduce these stepping errors, a good control scheme needs to be developed to drive the clamp piezo legs. It is of great advantage to use the self sensing property of the piezolegs to get a feedback signal because it prevents design changes to the actuator and saves valuable space. In this research, the self-sensing property of the piezolegs is applied to detect contact. This paper presents a novel application of the self-sensing contact detection method and a successful implementation inside the piezo-stepper to detect contact of the piezolegs with the driving rod.