Phase-field modelling of excimer laser lateral crystallization of silicon thin films

Burtsev, A; Apel, M; Ishihara, R.; Beenakker, C.I.M.

Phase-field modelling of excimer laser lateral crystallization of silicon thin films

Journal article (2003)

Authors

A Burtsev Electronic Components, Technology and Materials -

M Apel External organisation

R. Ishihara Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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Published Date

2003

Language

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials