A 200μW Eddy Current Displacement Sensor with 6.7nmRMS Resolution

Conference paper (2020)

Authors

Matheus Pimenta Cypress Semiconductor, Cork, Student
C. Gürleyük Electronic Instrumentation - EEMCS
Paul Walsh Cypress Semiconductor, Cork
Daniel O’Keeffe Cypress Semiconductor, Cork
M. Babaie Electronics - EEMCS
K.A.A. Makinwa Microelectronics
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Copyright: © 2020 Matheus Pimenta, C. Gürleyük, Paul Walsh, Daniel O’Keeffe, M. Babaie, K.A.A. Makinwa
DOI: https://doi.org/10.1109/VLSICircuits18222.2020.9162849
More Info
expand_more

Published Date

2020

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43μm range. It consumes 200μW from a 1.8V supply, which represents a 35× improvement on the state of the art.

Files

09162849.pdf
(pdf | 0.544 Mb)
- Embargo expired in 25-03-2022