From Silicon toward Silicon Carbide Smart Integrated Sensors

Middelburg, L.M.

doi:10.4233/d7e85d9b-9ef2-4d16-b9d7-2882a6177174

From Silicon toward Silicon Carbide Smart Integrated Sensors

Doctoral thesis (2020)

Authors

L.M. Middelburg Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

DOI: https://doi.org/10.4233/uuid:d7e85d9b-9ef2-4d16-b9d7-2882a6177174

MEMS Micromachining System integration Harsh environment Silicon carbide Smart sensors Pressure sensors Wide-bandgap semiconductors Particle sensors Suspended membranes SiC CMOS Monolithic integration

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Published Date

2020

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Files

PhD_diss_LM_Middelburg.pdf

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