Suppression of crystalline growth in silicon films deposited from hydrogen diluted silane using a layer-by-layer approach

van Elzakker, G; Tichelaar, F.D.; Zeman, M

Suppression of crystalline growth in silicon films deposited from hydrogen diluted silane using a layer-by-layer approach

Journal article (2007)

Authors

G van Elzakker Electronic Components, Technology and Materials

F.D. Tichelaar QN/High Resolution Electron Microscopy

M Zeman Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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2007

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Research Group

Electronic Components, Technology and Materials

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