Stress in sputter-deposited Cr films: Infleunce of ar pressure

Journal article (2005)

Authors

S Grachev OLD Surface and Interface Engineering
F. D. Tichelaar QN/High Resolution Electron Microscopy
GCAM Janssen OLD Surface and Interface Engineering
Research Group
OLD Surface and Interface Engineering
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Published Date

2005

Language

Undefined/Unknown

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Research Group

OLD Surface and Interface Engineering