Stress and stress gradients in magnetron sputtered TiN layers.

Kamminga, J.; Delhez, R.; de Keijser, Th.H; Mittemeijer, EJ

Stress and stress gradients in magnetron sputtered TiN layers.

Conference paper (1998)

Authors

J. Kamminga OLD Metals Processing, Microstructures and Properties

R. Delhez OLD Virtual Materials and Mechanics

Th.H de Keijser External organisation

EJ Mittemeijer OLD Virtual Materials and Mechanics

Research Group

OLD Metals Processing, Microstructures and Properties

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Published Date

1998

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Research Group

OLD Metals Processing, Microstructures and Properties