Stiction-induced sealing of surface micromachined channels

Morana, B.; Poelma, René H.; Fiorentino, G.; Wei, J.; Creemer, J.F.; Sarro, Lina

Stiction-induced sealing of surface micromachined channels

Journal article (2014)

Authors

B. Morana Electronic Components, Technology and Materials -

René H. Poelma Electronic Components, Technology and Materials -

G. Fiorentino Electronic Components, Technology and Materials -

J. Wei Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

Lina Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2014

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials