Active shape control of transmissive optical elements.

Conference paper (2009)

Authors

C.L. Valentin Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
JPM Vermeulen External organisation
T Cadee External organisation
D.J. Rixen Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

Abstract

Photolithography equipment manufacturers are continuously developing machines with ever increasing resolution and wafer throughput. The development has shown that previously less dominant performance limiting factors are increasingly impacting the conformity between the projected image and the object plane. It is evisaged that active optical elements are required for the correction of these non-conformities. This paper introduces the concept of active transmissive optical element shape control to improve focus whilst minimizing the effect of stress-biregringence and overlay.