Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

Conference paper (2011)

Authors

L. Mele Electronic Components, Technology and Materials - EEMCS
T Rossi External organisation
M Riccio External organisation
E. Iervolino Old - EWI Sect. ECTM
F. Santagata Electronic Components, Technology and Materials - EEMCS
A Irace External organisation
G Breglio External organisation
J.F. Creemer Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
More Info
expand_more

Published Date

2011

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials