Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

Mele, L.; Rossi, T; Riccio, M; Iervolino, E.; Santagata, F.; Irace, A; Breglio, G; Creemer, J.F.; Sarro, Pasqualina M

Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

Conference paper (2011)

Authors

L. Mele Electronic Components, Technology and Materials -

T Rossi External organisation

M Riccio External organisation

E. Iervolino Old - EWI Sect. ECTM

F. Santagata Electronic Components, Technology and Materials -

A Irace External organisation

G Breglio External organisation

J.F. Creemer Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2011

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials