Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

Mele, L; Rossi, T; Riccio, M; Iervolino, E.; Santagata, Fabio; Irace, A; Breglio, G; Creemer, JF; Sarro, P.M.

Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

Conference paper (2011)

Authors

L Mele Electronic Components, Technology and Materials

T Rossi External organisation

M Riccio External organisation

E. Iervolino Old - EWI Sect. ECTM

Fabio Santagata Electronic Components, Technology and Materials

A Irace External organisation

G Breglio External organisation

JF Creemer Electronic Components, Technology and Materials

P.M. Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

To reference this document use:

http://resolver.tudelft.nl/uuid:caa653eb-b805-475e-8004-18dece15a2d8

More Info

expand_more

Published Date

2011

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Components, Technology and Materials

No files available

Metadata only record. There are no files for this conference paper.