Titanium nitride for MEMS hotplates

Conference paper (2004)

Authors

J.F. Creemer Electronic Instrumentation - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
M Laros Electronic Components, Technology and Materials - EEMCS
H. Schellevis Electronic Components, Technology and Materials - EEMCS
T Nathoeni Old - EWI Ch. Integrated Sensing Devices
L.A. Steenweg Electronic Components, Technology and Materials - EEMCS
V. Svechnikov QN/High Resolution Electron Microscopy
H.W. Zandbergen QN/High Resolution Electron Microscopy
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2004

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation