Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates

Conference paper (2013)

Authors

B. Morana Electronic Components, Technology and Materials -

G. Fiorentino Electronic Components, Technology and Materials -

G. Pandraud Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2013

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials