Zernike generation with a non-contact, thermally actuated deformable mirror

Conference paper (2012)

Authors

G.J.M. Schutten Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
R. Saathof Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

Abstract

Wavefront aberrations are commonly expressed in a series of orthogonal Zernike polynomial terms [1]. Each of these Zernike polynomials mathematically describes a certain typical deviation from an ideal wavefront. To correct for optical aberrations a deformable mirror must be able to actuate the shapes corresponding to these terms. This paper presents the results of experiments to actuate a deformable mirror surface, using a non-contact thermal actuation principle. Thermal radiation induces a temperature distribution on the mirror substrate which causes mirror surface deformation. In the experiments, shapes are actuated up to Z3³ with amplitudes ~ 60 [nm] and ~ 3 [nm] root mean square (RMS) shape error.