On the aluminum-mediated solid-phase epitaxy of silicon at 300C

Conference paper (2008)

Authors

A. Sammak Electronic Components, Technology and Materials - EEMCS
Y Civale Old - EWI Sect. ECTM
L. K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2008

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials