A buried vertical filter for micro and nanoparticle filtration

Li, SJ (extern); Shen, C.; Sarro, Pasqualina M

A buried vertical filter for micro and nanoparticle filtration

Journal article (2012)

Authors

SJ (extern) Li External organisation

C. Shen Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:c77b8349-9c3e-427a-b0a8-1187ca99992e

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Published Date

2012

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials