a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness

Conference paper (2006)

Authors

J Su External organisation
Henk van Zeijl Electronic Components, Technology and Materials
SL Paalvast Mechatronic Systems Design
Lina Sarro Electronic Components, Technology and Materials
J. van Eijk Mechatronic Systems Design
Research Group
Electronic Components, Technology and Materials
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Published Date

2006

Language

Undefined/Unknown

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Research Group

Electronic Components, Technology and Materials

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