A novel technological process for glass-to-glass anodic bonding

Conference paper (1999)

Authors

M Berthold External organisation
L Nicola External organisation
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
MJ Vellekoop Electronic Instrumentation - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

1999

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials