A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness

Conference paper (2006)

Authors

Henk van Zeijl Electronic Components, Technology and Materials
J Su External organisation
SL Paalvast Mechatronic Systems Design
Lina Sarro Electronic Components, Technology and Materials
J. van Eijk Mechatronic Systems Design
Research Group
Electronic Components, Technology and Materials
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Published Date

2006

Language

Undefined/Unknown

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Research Group

Electronic Components, Technology and Materials

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